JPH0645325Y2 - 基板の表面処理装置 - Google Patents
基板の表面処理装置Info
- Publication number
- JPH0645325Y2 JPH0645325Y2 JP15194088U JP15194088U JPH0645325Y2 JP H0645325 Y2 JPH0645325 Y2 JP H0645325Y2 JP 15194088 U JP15194088 U JP 15194088U JP 15194088 U JP15194088 U JP 15194088U JP H0645325 Y2 JPH0645325 Y2 JP H0645325Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- friction roller
- roller
- backup
- end portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 80
- 238000004381 surface treatment Methods 0.000 title claims description 3
- 238000001514 detection method Methods 0.000 claims description 6
- 238000004804 winding Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 238000005498 polishing Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15194088U JPH0645325Y2 (ja) | 1988-11-22 | 1988-11-22 | 基板の表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15194088U JPH0645325Y2 (ja) | 1988-11-22 | 1988-11-22 | 基板の表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0274162U JPH0274162U (en]) | 1990-06-06 |
| JPH0645325Y2 true JPH0645325Y2 (ja) | 1994-11-24 |
Family
ID=31426430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15194088U Expired - Lifetime JPH0645325Y2 (ja) | 1988-11-22 | 1988-11-22 | 基板の表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645325Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009018410A (ja) * | 2007-06-15 | 2009-01-29 | Ishii Hyoki Corp | 研磨装置及び研磨方法 |
-
1988
- 1988-11-22 JP JP15194088U patent/JPH0645325Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0274162U (en]) | 1990-06-06 |
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